@article{oai:jaxa.repo.nii.ac.jp:00027140,
 author = {三田, 信 and 河原, 宏昭 and 年吉, 洋 and 遠藤, 潤二 and 藤田, 博之 and Mita, Makoto and Kawara, Hiroaki and Toshiyoshi, Hiroshi and Endo, Junji and Fujita, Hiroyuki},
 issue = {1},
 journal = {Journal of Microelectromechanical Systems},
 month = {Feb},
 note = {資料番号: SA1003844000},
 pages = {23--28},
 title = {Bulk Micromachined Tunneling Tips Integrated With Positioning Actuators},
 volume = {14},
 year = {2005}
}