@article{oai:jaxa.repo.nii.ac.jp:00027376, author = {吉川, 一朗 and 村地, 哲徳 and 竹中, 久貴 and 市丸, 智 and Yoshikawa, Ichiro and Murachi, Tetsunori and Takenaka, Hisataka and Ichimaru, Satoshi}, issue = {6}, journal = {Review of Scientific Instruments}, month = {Jun}, note = {Accepted: 2005-04-18, 資料番号: SA1004080000}, title = {Multilayer Coating for 30.4 nm}, volume = {76}, year = {2005} }