@article{oai:jaxa.repo.nii.ac.jp:00027383, author = {田島, 道夫 and 菅原, 岳樹 and 星乃, 紀博 and 谷本, 智 and 高橋, 徹夫 and 中島, 信一 and 山本, 武継 and Tajima, Michio and Sugahara, T. and Hoshino, Norihiro and Tanimoto, Satoshi and Takahashi, Tetsuo and Nakashima, Shinichi and Yamamoto, T.}, journal = {Materials Science Forum}, month = {}, note = {資料番号: SA1004087000}, pages = {569--572}, title = {Photoluminescence Mapping of a SiC Wafer in Device Processing}, volume = {457-460}, year = {2004} }