@article{oai:jaxa.repo.nii.ac.jp:00027563,
 author = {Riveros, Raul E. and 山口, ひとみ and Boggs, Taylor and 三石, 郁之 and 満田, 和久 and 高木, うた子 and 江副, 祐一郎 and 石津, 健佑 and 森山, 鉄平 and Riveros, Raul E. and Yamaguchi, Hitomi and Boggs, Taylor and Mitsuishi, Ikuyuki and Mitsuda, Kazuhisa and Takagi, Utako and Ezoe, Yuichiro and Ishizu, Kensuke and Moriyama, Teppei},
 issue = {5},
 journal = {Transactions of the ASME. Journal of Manufacturing Science and Engineering},
 month = {Oct},
 note = {Accepted: 2012-05-21, 資料番号: SA1004267000},
 title = {Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics},
 volume = {134},
 year = {2012}
}