@article{oai:jaxa.repo.nii.ac.jp:00027898, author = {三田, 信 and 安宅, 学 and 年吉, 洋 and Mita, Makoto and Ataka, Manabu and Toshiyoshi, Hiroshi}, issue = {8}, journal = {IEICE Electronics Express}, month = {Apr}, note = {Accepted: 2013-03-25, 資料番号: SA1004606000}, title = {Microelectromechanical XNOR and XOR Logic Devices}, volume = {10}, year = {2013} }