@article{oai:jaxa.repo.nii.ac.jp:00027929,
 author = {小西, 敏文 and 町田, 克之 and 丸山, 智史 and 三田, 信 and 益, 一哉 and 年吉, 洋 and Konishi, Toshifumi and Machida, Katsuyuki and Maruyama, Satoshi and Mita, Makoto and Masu, Kazuya and Toshiyoshi, Hiroshi},
 issue = {3},
 journal = {Journal of Microelectromechanical Systems},
 month = {Jun},
 note = {Accepted: 2013-01-15, 資料番号: SA1004637000},
 pages = {755--767},
 title = {A Single-Platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator With Hardware Description Language},
 volume = {22},
 year = {2013}
}