@article{oai:jaxa.repo.nii.ac.jp:00028155, author = {小川, 智弘 and 江副, 祐一郎 and 森山, 鉄平 and 三石, 郁之 and 垣内, 巧也 and 大橋, 隆哉 and 満田, 和久 and Putkonen, Matti and Ogawa, Tomohiro and Ezoe, Yuichiro and Moriyama, Teppei and Mitsuishi, Ikuyuki and Kakiuchi, Takuya and Ohashi, Takaya and Mitsuda, Kazuhisa and Putkonen, Matti}, issue = {24}, journal = {Applied Optics}, month = {Aug}, note = {Accepted: 2013-07-18, 資料番号: SA1004863000}, pages = {5949--5956}, title = {Iridium-Coated Micropore X-ray Optics Using Dry Etching of a Silicon Wafer and Atomic Layer Deposition}, volume = {52}, year = {2013} }