@article{oai:jaxa.repo.nii.ac.jp:00028480, author = {山羽, 隆 and 中塚, 理 and 田岡, 紀之 and 木下, 恭一 and 依田, 眞一 and 財満, 鎭明 and Yamaha, Takashi and Nakatsuka, Osamu and Taoka, Noriyuki and Kinoshita, Kyoichi and Yoda, Shinichi and Zaima, Shigeaki}, journal = {Thin Solid Films}, month = {Apr}, note = {資料番号: SA1140014000}, pages = {129--134}, title = {Characterization of Crystalline Structures of SiGe Substrate Formed by Traveling Liquidus-Zone Method for Devices with Ge/SiGe Structures}, volume = {557}, year = {2014} }