@article{oai:jaxa.repo.nii.ac.jp:00028516,
 author = {鈴木, 仁研 and Khosropanah, P. and Hijmering, R. A. and Ridder, M. and Schoemans, M. and Hoevers, H. and Gao, J. R. and Suzuki, Toyoaki and Khosropanah, P. and Hijmering, R. A. and Ridder, M. and Schoemans, M. and Hoevers, H. and Gao, J. R.},
 issue = {2},
 journal = {IEEE Transactions on Terahertz Science and Technology},
 month = {Mar},
 note = {資料番号: SA1140050000},
 pages = {171--178},
 title = {Performance of SAFARI Short-Wavelength-Band Transition Edge Sensors (TES) Fabricated by Deep Reactive Ion Etching},
 volume = {4},
 year = {2014}
}