@article{oai:jaxa.repo.nii.ac.jp:00029335, author = {槙坪, 宏展 and 和田, 武彦 and 片坐, 宏一 and 三田, 信 and 鈴木, 仁研 and 山本, 啓太 and Makitsubo, Hironobu and Wada, Takehiko and Kataza, Hirokazu and Mita, Makoto and Suzuki, Toyoaki and Yamamoto, Keita}, issue = {2}, journal = {Journal of Infrared Millimeter and Terahertz Waves}, month = {Feb}, note = {Accepted: 2016-10-07, 資料番号: SA1160312000}, pages = {206--214}, title = {Fabrication and Analysis of Three-Layer All-Silicon Interference Optical Filter with Sub-Wavelength Structure toward High Performance Terahertz Optics}, volume = {38}, year = {2017} }