@article{oai:jaxa.repo.nii.ac.jp:00029398, author = {石川, 久美 and 江副, 祐一郎 and 沼澤, 正樹 and 小川, 智弘 and 佐藤, 真柚 and 中村, 果澄 and 大橋, 隆哉 and 満田, 和久 and 前田, 龍太郎 and 廣島, 洋 and 倉島, 優一 and 野田, 大二 and Ishikawa, Kumi and Ezoe, Yuichiro and Numazawa, Masaki and Ogawa, Tomohiro and Sato, Mayu and Nakamura, Kasumi and Ohashi, Takaya and Mitsuda, Kazuhisa and Maeda, Ryutaro and Hiroshima, Hiroshi and Kurashima, Yuichi and Noda, Daiji}, issue = {7}, journal = {Microsystem Technologies}, month = {Jul}, note = {著者人数: 12名, Accepted: 2016-04-28, 資料番号: SA1160375000}, pages = {2815--2821}, title = {12-inch X-ray optics based on MEMS Process}, volume = {23}, year = {2017} }