{"created":"2023-06-20T15:00:28.823595+00:00","id":29404,"links":{},"metadata":{"_buckets":{"deposit":"10e3e6b7-7b0d-4255-96f6-3f72ca6b813d"},"_deposit":{"created_by":1,"id":"29404","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"29404"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00029404","sets":["1887:1888"]},"author_link":["366764","366750","366762","366766","366748","366741","366749","366746","366760","366757","366745","366753","366759","366752","366756","366743","366747","366761","366754","366755","366742","366765","366744","366758","366751","366763"],"item_7_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-06","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6S1","bibliographicVolumeNumber":"56","bibliographic_titles":[{},{"bibliographic_title":"Japanese Journal of Applied Physics","bibliographic_titleLang":"en"}]}]},"item_7_description_18":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"著者人数: 13名","subitem_description_type":"Other"}]},"item_7_description_19":{"attribute_name":"内容記述（英）","attribute_value_mlt":[{"subitem_description":"Accepted: 2017-02-07","subitem_description_type":"Other"}]},"item_7_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: SA1170004000","subitem_description_type":"Other"}]},"item_7_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Japan Society of Applied Physics"}]},"item_7_relation_25":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"info:doi/10.7567/JJAP.56.06GN04"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://dx.doi.org/10.7567/JJAP.56.06GN04","subitem_relation_type_select":"DOI"}}]},"item_7_source_id_21":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0021-4922","subitem_source_identifier_type":"ISSN"}]},"item_7_source_id_24":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12295836","subitem_source_identifier_type":"NCID"}]},"item_7_text_11":{"attribute_name":"文献番号","attribute_value_mlt":[{"subitem_text_value":"06GN04"}]},"item_7_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"首都大学東京"},{"subitem_text_value":"京都大学"},{"subitem_text_value":"科学技術振興機構"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"}]},"item_7_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Tokyo Metropolitan University"},{"subitem_text_language":"en","subitem_text_value":"Kyoto University"},{"subitem_text_language":"en","subitem_text_value":"Japan Science and Technology Agency"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"武内, 数馬"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"江副, 祐一郎"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"石川, 久美"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"中村, 果澄"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"沼澤, 正樹"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"寺田, 優"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"藤谷, 麻衣子"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"伊師, 大毅"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"野田, 祐介"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"大橋, 隆哉"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"森下, 浩平"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"中嶋, 一雄"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"満田, 和久"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takeuchi, Kazuma","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ezoe, Yuichiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ishikawa, Kumi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakamura, Kasumi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Numazawa, Masaki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Terada, Masaru","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fujitani, Maiko","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ishi, Daiki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Noda, Yusuke","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ohashi, Takaya","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Morishita, Kohei","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakajima, Kazuo","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Mitsuda, Kazuhisa","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching","subitem_title_language":"en"}]},"item_type_id":"7","owner":"1","path":["1888"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-04"},"publish_date":"2017-10-04","publish_status":"0","recid":"29404","relation_version_is_last":true,"title":["X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T01:35:16.089479+00:00"}