@inproceedings{oai:jaxa.repo.nii.ac.jp:00039582, author = {宮崎, 英治 and 島﨑, 一紀 and 沼田, 治 and 和気, 美幸 and 山中, 理代 and 木本, 雄吾 and Miyazaki, Eiji and Shimazaki, Kazunori and Numata, Osamu and Waki, Miyuki and Yamanaka, Riyo and Kimoto, Yugo}, book = {Proceedings of SPIE: Systems Contamination: Prediction, Control, and Performance 2016}, month = {}, note = {SPIE Optical Engineering + Applications 2016 (August 28-September 1, 2016), San Diego, California, USA, 形態: 図版あり, Physical characteristics: Original contains illustrations, 資料番号: PA1710045000}, pages = {99520K-1--99520K-9}, publisher = {The International Society for Optical Engineering (SPIE)}, title = {A new experimental procedure of outgassing rate measurement to obtain more precise deposition properties of materials}, volume = {9952}, year = {2016} }