@article{oai:jaxa.repo.nii.ac.jp:00046084,
 author = {福島, 碧都 and 藤谷, 麻衣子 and 石川, 久美 and 沼澤, 正樹 and 伊師, 大貴 and 大坪, 亮太 and 永利, 光 and 鈴木, 光 and 湯浅, 辰哉 and 大橋, 隆哉 and 満田, 和久 and 江副, 祐一郎 and Fukushima, Aoto and Fujitani, Maiko and Ishikawa, Kumi and Numazawa, Masaki and Ishi, Daiki and Otsubo, Ryota and Nagatoshi, Hikaru and Suzuki, Hikaru and Yuasa, Tatsuya and Ohashi, Takaya and Mitsuda, Kazuhisa and Ezoe, Yuichiro},
 issue = {19},
 journal = {Applied Optics},
 month = {Jul},
 note = {著者人数: 12名, Accepted: 2019-06-07, 資料番号: SA1190048000},
 pages = {5240--5247},
 title = {Grinding and chemical mechanics polishing process for micropore x-ray optics fabricated with deep reactive ion etching},
 volume = {58},
 year = {2019}
}