@article{oai:jaxa.repo.nii.ac.jp:00046234,
 author = {三田, 信 and 安宅, 学 and 年吉, 洋 and Mita, Makoto and Ataka, Manabu and Toshiyoshi, Hiroshi},
 issue = {1},
 journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）, IEEJ Transactions on Sensors and Micromachines},
 month = {Jan},
 note = {資料番号: SA1190198000},
 pages = {2--13},
 title = {Electrostatic Microelectromechanical Logic Devices Made by CMOS-compatible Surface Micromachining},
 volume = {140},
 year = {2020}
}