{"created":"2023-06-20T14:39:53.433757+00:00","id":6711,"links":{},"metadata":{"_buckets":{"deposit":"93397011-a7f3-4a9c-8799-ddb0930b0581"},"_deposit":{"created_by":1,"id":"6711","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"6711"},"status":"published"},"_oai":{"id":"oai:jaxa.repo.nii.ac.jp:00006711","sets":["1543:1544:1545","1887:1891"]},"author_link":["34453","34452","34450","34451","34455","34454","34456","34457"],"item_5_alternative_title_1":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"スパッタリング法による多層膜の形状制御に関する研究"}]},"item_5_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2018-07","bibliographicIssueDateType":"Issued"},"bibliographic_titles":[{"bibliographic_title":"[第28回アストロダイナミクスシンポジウム講演後刷り集]"},{"bibliographic_title":"The 28th Workshop on JAXA Astrodynamics and Flight Mechanics","bibliographic_titleLang":"en"}]}]},"item_5_description_14":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"第28回アストロダイナミクスシンポジウム (2018年7月30-31日. 宇宙航空研究開発機構宇宙科学研究所), 相模原市, 神奈川県","subitem_description_type":"Other"}]},"item_5_description_15":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）（英）","attribute_value_mlt":[{"subitem_description":"The 28th Workshop on JAXA Astrodynamics and Flight Mechanics 2018 (July 30-31, 2018. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)), Sagamihara, Kanagawa Japan","subitem_description_type":"Other"}]},"item_5_description_32":{"attribute_name":"資料番号","attribute_value_mlt":[{"subitem_description":"資料番号: SA6000135023","subitem_description_type":"Other"}]},"item_5_description_33":{"attribute_name":"レポート番号","attribute_value_mlt":[{"subitem_description":"レポート番号: A-23","subitem_description_type":"Other"}]},"item_5_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"}]},"item_5_publisher_9":{"attribute_name":"出版者（英）","attribute_value_mlt":[{"subitem_publisher":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"}]},"item_5_text_6":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"青山学院大学"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"},{"subitem_text_value":"宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)"},{"subitem_text_value":"青山学院大学"}]},"item_5_text_7":{"attribute_name":"著者所属（英）","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Department of Science and Engineering, Aoyama Gakuin University"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"},{"subitem_text_language":"en","subitem_text_value":"Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS)"},{"subitem_text_language":"en","subitem_text_value":"Department of Science and Engineering, Aoyama Gakuin University"}]},"item_5_version_type_30":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"池田, 崚太"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"森, 治"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"佐藤, 泰貴"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"菅原, 佳城"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ikeda, Ryota","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Mori, Osamu","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Sato, Yasutaka","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Sugawara, Yoshiki","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-01-16"}],"displaytype":"detail","filename":"SA6000135023.pdf","filesize":[{"value":"607.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"SA6000135023.pdf","url":"https://jaxa.repo.nii.ac.jp/record/6711/files/SA6000135023.pdf"},"version_id":"8a0e7c46-dae0-4bb7-8a84-5f322e41e96f"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Sputtering","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Curvature Control","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Membrane Structures","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Multi-layer","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Internal Stress","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"A study on Curvature Control of Multi-Layer Film by Sputtering","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"A study on Curvature Control of Multi-Layer Film by Sputtering","subitem_title_language":"en"}]},"item_type_id":"5","owner":"1","path":["1545","1891"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-06-10"},"publish_date":"2019-06-10","publish_status":"0","recid":"6711","relation_version_is_last":true,"title":["A study on Curvature Control of Multi-Layer Film by Sputtering"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-21T07:50:40.411950+00:00"}