MU 300 aircraft, parabolic flight, microgravity environment, CVD, chemical vapor deposition, He plasma, gravitational effect, diamond, anode temperature, plasma spectrum, SFU, space flyer unit, EFFU, exposed facility flyer unit, GDEF
National Space Development Agency of Japan
National Space Development Agency of Japan
Mitsubishi Research Institute Inc
Mitsubishi Research Institute Inc
Mitsubishi Research Institute Inc
National Institute for Research in Inorganic Materials
Aoyama Gakuin University
Sumitomo Electric Industries Ltd
出版者
宇宙開発事業団
出版者（英）
National Space Development Agency of Japan (NASDA)
Experimental studies of gravitational effects on the behavior of plasma in CVD (Chemical Vapor Deposition) process are performed utilizing MU-300 airplane. These experiments are conducted as the preliminary studies of SFU/EFFU/GDEF (Space Flyer Unit/Exposed Facility Flyer Unit/Gas Dynamics Experiment Facility) project. The characteristic of plasma is obviously different between micro g and 1 g conditions. The plasma changes to be more active in micro g compared with in 1 g.
気相成長基礎実験装置(GDEF)を用いたSFU宇宙実験のための航空機予備実験
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