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Rapid Characterization of SiC Crystals by Full-wafer Photoluminescence Imaging under Below-gap Excitation
https://jaxa.repo.nii.ac.jp/records/23095
https://jaxa.repo.nii.ac.jp/records/2309548e416da-c935-4d1f-a68a-cb92df684f50
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Rapid Characterization of SiC Crystals by Full-wafer Photoluminescence Imaging under Below-gap Excitation | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Structural defects | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Dislocations | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Photoluminescence | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Imaging | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Mapping | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Full-wafer inspection | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Below-gap excitation | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
磯野, 秀明
× 磯野, 秀明× 田島, 道夫× 星乃, 紀博× 杉本, 広紀× ISONO, H.× TAJIMA, M.× HOSHINO, N.× SUGIMOTO, H. |
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著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
出版者(英) | ||||||
出版者 | Trans Tech Publications | |||||
書誌情報 |
en : Materials Science Forum 巻 600-603, 号 1, p. 545-548, 発行日 2009 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0255-5476 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.4028/www.scientific.net/MSF.600-603.545 | |||||
関連名称 | info:doi/10.4028/www.scientific.net/MSF.600-603.545 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: PAIS08046000 |