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Uniaxial and biaxial strain field dependence of the thermal oxidation rate of silicon
https://jaxa.repo.nii.ac.jp/records/25328
https://jaxa.repo.nii.ac.jp/records/25328e9eb093b-68e7-4fa1-a03f-15f07c899762
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Uniaxial and biaxial strain field dependence of the thermal oxidation rate of silicon | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
乃万, 裕一
× 乃万, 裕一× 高橋, 宏行× 藤岡, 洋× 尾嶋, 正治× 馬場, 祐治× 廣瀬, 和之× 丹羽, 正昭× 臼田, 宏治× 平下, 紀夫× Noma, Hirokazu× Takahashi, Hiroyuki× Fujioka, Hiroshi× Oshima, Masahara× Baba, Yuji× Hirose, Kazuyuki× Niwa, Masaaki× Usuda, Koji× Hirashita, Norio |
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著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
東京大学 | ||||||
著者所属 | ||||||
日本原子力研究開発機構 | ||||||
著者所属 | ||||||
宇宙科学研究所 | ||||||
著者所属 | ||||||
半導体理工学研究センター | ||||||
著者所属 | ||||||
半導体理工学研究センター | ||||||
著者所属 | ||||||
半導体理工学研究センター | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Chemistry, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Chemistry, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Chemistry, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Chemistry, The University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Japan Atomic Energy Research Institute | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science (ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Semiconductor Technology Academic Research Center | ||||||
著者所属(英) | ||||||
en | ||||||
Semiconductor Technology Academic Research Center | ||||||
著者所属(英) | ||||||
en | ||||||
Semiconductor Technology Academic Research Center | ||||||
出版者(英) | ||||||
出版者 | American Institute of Physics | |||||
書誌情報 |
en : Journal of Applied Physics 巻 90, 号 10, p. 5434-5437, 発行日 2001-11 |
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内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2001-08-30 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0021-8979 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1063/1.1413229 | |||||
関連名称 | info:doi/10.1063/1.1413229 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1002030000 |