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Nondestructive characterization of dislocations and micropipes in high-resistivity 6H-SiC wafers by deep-level photoluminescence mapping
https://jaxa.repo.nii.ac.jp/records/26630
https://jaxa.repo.nii.ac.jp/records/266307a85c285-1e4a-4338-ae44-ba0219b049cc
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Nondestructive characterization of dislocations and micropipes in high-resistivity 6H-SiC wafers by deep-level photoluminescence mapping | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
田島, 道夫
× 田島, 道夫× 東, 栄光× 林, 利彦× 木下, 博之× 塩見, 弘× Tajima, Michio× Higashi, Eiko× Hayashi, T.× Kinoshita, H.× Shiomi, H. |
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著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部(JAXA) (ISAS) | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究本部(JAXA) (ISAS) | ||||||
著者所属 | ||||||
シクスオン | ||||||
著者所属 | ||||||
シクスオン | ||||||
著者所属 | ||||||
シクスオン | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
SiXON Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
SiXON Ltd. | ||||||
著者所属(英) | ||||||
en | ||||||
SiXON Ltd. | ||||||
出版者(英) | ||||||
出版者 | American Institute of Physics | |||||
書誌情報 |
en : Applied Physics Letters 巻 86, 号 6, 発行日 2005 |
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文献番号 | ||||||
061914 | ||||||
内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2004-12-11 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543431 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1063/1.1862330 | |||||
関連名称 | info:doi/10.1063/1.1862330 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1003332000 |