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LSIプロセス診断技術による民生用半導体部品の評価
https://jaxa.repo.nii.ac.jp/records/6296
https://jaxa.repo.nii.ac.jp/records/629602c60016-a706-4f2b-a6d3-c12a6f9c307a
名前 / ファイル | ライセンス | アクション |
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49054040.pdf (1.4 MB)
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Item type | テクニカルレポート / Technical Report(1) | |||||
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公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | LSIプロセス診断技術による民生用半導体部品の評価 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 宇宙機電子機器 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 半導体装置 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 品質保証 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 部品信頼性 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ウェハプロセス | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | LISプロセス診断 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 信頼性試験 | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | spacecraft electronic equipment | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | semiconductor device | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | quality assurance | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | component reliability | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | wafer process | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | LIS process diagnosis | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | reliability test | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_18gh | |||||
資源タイプ | technical report | |||||
その他のタイトル(英) | ||||||
その他のタイトル | The evaluation of commercial semiconductor devices by LSI process diagnosis technology | |||||
著者 |
岡, 克己
× 岡, 克己× 久保山, 智司× 松田, 純夫× Oka, Katsumi× Kuboyama, Satoshi× Matsuda, Sumio |
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著者所属 | ||||||
宇宙航空研究開発機構 総合技術研究本部 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構 総合技術研究本部 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構 総合技術研究本部 | ||||||
著者所属(英) | ||||||
en | ||||||
Japan Aerospace Exploration Agency Institute of Space Technology and Aeronautics | ||||||
著者所属(英) | ||||||
en | ||||||
Japan Aerospace Exploration Agency Institute of Space Technology and Aeronautics | ||||||
著者所属(英) | ||||||
en | ||||||
Japan Aerospace Exploration Agency Institute of Space Technology and Aeronautics | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構 | |||||
出版者(英) | ||||||
出版者 | Japan Aerospace Exploration Agency (JAXA) | |||||
書誌情報 |
宇宙航空研究開発機構特別資料: 平成16年度総合技術研究本部宇宙領域宇宙科学研究本部合同研究成果報告書:人工衛星系基盤技術 en : JAXA Special Publication: FY2004 Report of Joint Research Achievements of the Space Division of Institute of Aerospace Technology and Institute of Space and Astronautical Science: Basic Technologies of Satellite Systems 巻 JAXA-SP-05-008, p. 193-196, 発行日 2006-01-20 |
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抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | It outlines the LSI-process diagnosis technology which screens the commercial components for high-reliability space applications. The inspection of the failure-included lot was performed, and the validity of this technique was examined recursively. As a result, some advantages of contributing to more definitive diagnosis were shown. | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1349-113X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11984031 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0049054040 | |||||
レポート番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | レポート番号: JAXA-SP-05-008 |